Hi Roger,

Ti is indeed attacked by KOH. I don't know the etchrate, but with long
etch-times you definately het problems. We normally use Cr as adhesion-layer
whenever we need to do KOH-etching after the etalization.

Succes,
Jason

___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl



-----Original Message-----
From: Roger Shile [mailto:[email protected]]
Sent: dinsdag 25 maart 2003 21:52
To: MEMS Discussion Group
Subject: [mems-talk] Ti attack by KOH


Can someone tell me if titnanium can be used as an adhesion layer for gold
when the metalization will be subjected to a long KOH etch?
In my experience, chemistries that etch Si, such as HF and fluorine based
plasmas, will also etch Ti.  I therefore suspect that KOH will etch Ti, but
haven't found any published data.

Roger Shile
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