RIE with oxygen works well on patterning parylene. Shipley 1818 as mask with
1 hour hard bake is OK.

Good luck,

Hongjun Zeng, PhD
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of hui li
Sent: Wednesday, March 26, 2003 7:34 PM
To: [email protected]
Subject: [mems-talk] parylene patterning


Hi,

My Name is Yanni, I am looking for a method to pattern parylen. Could anyone
suggest me some literatures to read or just tell me what photoresis/etchant
combination i can use?

Thanks very much,

Yanni


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