Although there are many good recent MEMS books (my favorites are
Introduction to MEMS (Maluf), Fundamentals of Microfabrication (Madou) and
Micromachined Transducers Sourcebook (Kovacs)), if you are looking for
mechanical design, I would suggest the following:

Micromechanics and MEMS, Classic and Seminal Papers to 1990 (William
Trimmer, editor) - these papers are an excellent resource and include a lot
of design detail for cantilevers, plates, etc.

Mechanics of Materials (Gere and Timoshenko) - although not a MEMS book,
there is no better mechanical resource.  It seemed that the newer versions
did not cover the more non-linear plate bending and large deflection
models, but still an important resource.

Of course, see Bill Trimmer's website which is a great resource for MEMS
texts (http://www.trimmer.net/).

Have fun, and remember, a couple of months in the lab can easily save you a
few hours in the library.

-Kevin

Kevin C. Stark, Ph.D.
Senior Program Manager
NineSigma, Inc.
21945 Chagrin Blvd.
Cleveland, OH  44122
216-295-4806
216-295-4825 (fax)
[email protected]
www.ninesigma.com


-----Original Message-----

hi all,my name is abhiram  and this is my first mail to the group.could
one of you help me in finding a good book on
mems(more of
mechanical) and also on the design of actuators and sensors.
secondly i would like to know if anyone of you worked on taguchi methods.

thats all for now.
regards
abhiram.