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MEMSnet Home: MEMS-Talk: AlN for piezoelectric device
AlN for piezoelectric device
2003-03-27
chris menzel
2003-03-28
Robert Okojie
AlN for piezoelectric device
Robert Okojie
2003-03-28
Chris:

If it is single crystal AlN wafers you want, forget it.  They don't exist
for purchase at earthly price.  Technologies and Devices International,
Inc. grows AlN epitaxially on silicon carbide (0.1 to 0.2 microns).  I
doubt this will help, but you can call them at (301) 572-7834.  Brace
yourself for a price shocker!

Amorphous AlN "wafers" are essentially sintered from green state. With the
impurities in the ones I have used, the CMOS foundry will keep you at pole
length!

Contact Sienna Technologies at (425)485-7272.

Best.


Robert S. Okojie, Ph.D.
NASA-Glenn Research Center
Sensors and Electronics Branch
21000 Brookpark Road, M/S 77-1
Cleveland, OH 44135.
Ph: 216/433-6522;       Fax: 216/433-8643
e-mail: [email protected]
http://www.lerc.nasa.gov/WWW/SiC/SiC.html


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