Alloy deposition is very much different than pure metal.  Because stainless
steel has a number of thermodynamic structures your deposition conditions
need control.  With CVD, ion and PVD, I suppose that with enough time and
money you could develop a special heating stage, vacuum chamber and process.
However, stainless steel deposition is common using micro plasma spray
techniques. Most often in the metal or ceramic finishing industry, micro
plasma deposition thickness control and porosity are problems for micro
electronic applications.

It would be interesting research to try to make a stainless steel (corrosion
resistant) lined mems reactor and channels.  Contamination of product
streams in micro reactors is a problem that will need to be overcome to take
this technology to market.
Rob

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf
Of Hongjun Zeng
Sent: Wednesday, March 26, 2003 12:44 PM
To: MEMS2
Cc: [email protected]
Subject: [mems-talk] deposit stainless steel


Dear all,

Anybody knows, or has the experience of depositing stainless steel on glass
or other insulating substrate?

Thanks,
Hongjun Zeng
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465



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