I Abhiram,

Being a Mehanical Engineer I found the following to be quite good
references for MEMS fabrication, design and analyses:

Intro to Microfabrication - Marc Madou.
Micromachined Transducers Sourcebook - Greg Kovacs.
Microsystem Design - Steve Senturia.

This should keep you busy reading for a while!

Debjyoti Banerjee, Ph.D.
Microfluidics Engineer
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA 95008.
Ph: (408) 379-9069 x202
Fax: (408) 370-9072
Email: [email protected]
www.nanoink-inc.com


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Lakshmi Abhiram
Sent: Wednesday, March 26, 2003 2:03 PM
To: [email protected]
Subject: [mems-talk] looking for a good book on mems

hi all,my name is abhiram  and this is my first mail to the group.could
one of you help me in finding a good book on
mems(more of
mechanical) and also on the design of actuators and sensors.
secondly i would like to know if anyone of you worked on taguchi
methods.

thats all for now.
regards
abhiram.


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