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MEMSnet Home: MEMS-Talk: Epoxy resistant to TMAH etch
Epoxy resistant to TMAH etch
2003-03-25
Jazo, Hugo SPAWAR
2003-03-31
Michael D Martin
Epoxy resistant to TMAH etch
Michael D Martin
2003-03-31
Hi Hugo,
   If you pretreat both surfaces with HMDS you can get super glue to
work for about an hour in 5% TMAH.

-Mike

>>> [email protected] 03/25/03 02:28PM >>>
Hello all,

Does anyone know of, or has experience with, an epoxy that is etch
resist to TMAH?  An epoxy would be the first choice, but I am open to
other ideas like solder perhaps?

The problem is, I already have singulated die so I cant deposit a film
on the backside of the die for good eutectic or solder wetting.



Thanks,
Hugo

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