Hi,

Try the following reference

An angle-based design approach for rectangular electrostatic torsion
actuators
Xiao, Z.; Wu, X.-T.; Peng, W.; Farmer, K.R.;
Microelectromechanical Systems, Journal of , Volume: 10 Issue: 4 , Dec 2001
Page(s): 561 -568

and try to contact the author for further information at [email protected]

Regards

Ofir

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
sou zou
Sent: Monday, March 31, 2003 6:16 PM
To: [email protected]
Subject: [mems-talk] torsioanal springs ?



Hi folks,

Looking for some torsional spring shapes to rotate some mirrors. In fact,
the only ideas in hand are related either to the thin straight beams or
folded springs (meanders). they are probably the only choices, but i didn't
find any technical documentation to optimise the folded spring (size, number
of meanders, eigenfrequency), which obviously would save a lot of time
rather than running FEM packages... Any advices would be greatly appreciated
fellas. By the way, I heard about roark's digitised formulas, does anyone
have them or could tell me if we could rely on them and under which
conditions...

Many thanks in anticipation

Sofiane



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