Hello,
    The book "Mechanical Microsensors"(M. Elwenspoek, Springer) may meet
your needs. It gives an overview on mechanical microsensors (sensors for
pressure, force,acceleration, angular rate and fluid flow, realized by
silicon micromachining) and a comprehensive introduction on the basic
design issues of these sensors. I think it is quite suitable for a fresh
man in microsensor design and fabrication.

Best regards,

Xiaotong
04/01/2003


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