Check the key word "HEBS" in APPLIED OPTICS, OPTICAL ENGINEERING etc or even
GOOGLE, you will find out something about grey scale mask tech.
Hongjun Zeng, PhD
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Han Chong
Sent: Thursday, April 03, 2003 10:14 PM
To: [email protected]
Subject: [mems-talk] Grey scale mask
Hi all,
Does any one know where can I get a grey scale mask to be made?
Thanks
regards
Han
RMIT University
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