Hi everyone,
I am using Az series photoresist. There is one parameter named "k" in the
technical parameters, which varys a lot from unbleached photoresist to
bleached photoresist. I guess it could have some relationship with
absorption of light. Does anyone know the definition of this parameter?
Thanks a lot!
Peng Yao
DOEs lab
Electrical Engineering Dept.
Univeristy of delaware
Newark D.E 19716