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MEMSnet Home: MEMS-Talk: what's the meaning of k for photoresist
what's the meaning of k for photoresist
2003-04-08
Peng Yao
2003-04-09
Roger Shile
2003-04-14
Tun Zainal Zulkifli
what's the meaning of k for photoresist
Peng Yao
2003-04-08
Hi everyone,
I am using Az series photoresist. There is one parameter named "k" in the
technical parameters, which varys a lot from unbleached photoresist to
bleached photoresist. I guess it could have some relationship with
absorption of light. Does anyone know the definition of this parameter?
Thanks a lot!


Peng Yao
DOEs lab
Electrical Engineering Dept.
Univeristy of delaware
Newark D.E 19716

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