Hello Virginia,

In terms of a wet etchant for Ti/W you can try a H2O2 mixture by Transene
Company, Inc. The product name is Ti-Tungsten Etchant TiW-30. The website is
transene.com I currently use the product and it works well. It should not
harm the Gold, Aluminum, or Alumina that you are working with. If you get a
chance let me know how things work out. Thanks

Lenny Fuste
Mfg. Tech.
[email protected]


----- Original Message -----
From: "Virginia Soares" 
To: 
Sent: Friday, April 04, 2003 9:22 AM
Subject: [mems-talk] Looking for TiW etchant


> Dear listers,
>
> Could you tell me if there is any wet etchant for TiW that would not etch
gold nor aluminium or alumina?We are thinking of using H2O2 and water but we
do not have the possibility to make thick gold layer which makes it very
difficult to determine slectivities.
>
> Thank you in advance
>
>
> Virginia Soares
> INESC-Microsystems and Microtecnologies
> Rua Alves Redol,9
> 1000-029 LISBOA
> PORTUGAL
> URL:www.inesc-mn.pt
>
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