Chapman measured for us some profiles of the microbeams we made with MUMPs. It
gave us the details of poly surface. However the reading did not show
long-range straightness (>100 microns length). We are not sure if the machine
didn't provide long-range flatness or the beams were bent, since we didn't have
direct comparision with other measurement. We may try the measurment again with
more structures of known profiles in the future. I am replying to public for
this, since it may interest many.

CJ Kim
Assistant Professor
UCLA