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MEMSnet Home: MEMS-Talk: Deposit Si with low temperature
Deposit Si with low temperature
2003-04-11
Xi, Jingqun
2003-04-14
Tun Zainal Zulkifli
Deposit Si with low temperature
Xi, Jingqun
2003-04-11
 Is there any people has the experience to deposit the thin film of
 crystalline silicon in the low temperature processing environment? I need
to
 know which kind of technique can do such thing.

 Regards,

 Jingqun Xi


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