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MEMSnet Home: MEMS-Talk: Etch through pyrex
Etch through pyrex
2003-04-11
Helen Berney
2003-04-11
[email protected]
2003-04-14
Dlee Li
Etch through pyrex
[email protected]
2003-04-11
Maybe using wet chemistry. I don't know of anyone who can do Pyrex with plasma.
Bob Henderson Trion Tech

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