We used UV curable adhesive. For the exact patterning, screen printing,
and normal UV aligner can be used.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Kyutae Yoo
Sent: Sunday, April 13, 2003 8:22 PM
To: [email protected]
Subject: [mems-talk] bio-compatible adhesive material

Hello,

I am looking for a bio-compatible adhesive material(glue) for wafer
bonding.
Does anyone know such material or have used it for wafer bonding?
Thank you

sincerely,
------------------------------------------------
Kyutae Yoo, Ph.D.

MEMS Lab
Samsung Advanced Institute of Technology (SAIT)
Tel(Office)   : +82-31-280-6948
Fax(Office)  : +82-31-280-8277
Tel(Mobile) : +82-11-345-5641

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