Hello,

Some polymeric materials, such as LCP, can be etched with heated
KOH.  Additionally, even though it is not a wet etch, many polymeric
materials can be etched with O2/Ar RIE, using a simple thin film patterned
metallic mask.

Sincerely,

Robert Dean

At 03:04 PM 4/14/03 -0400, you wrote:
>Not entirely true. There is a group at CERN headed by Fabio Sauli that
>regularly wet etches Dupont polyimide foils to make radiation detectors.
>Search Nuclear Instruments and Methods (an Elsivier Pub.) for GEMs (Gas
>Electron Multipliers). If you the reference maybe you could share them
>with us.
>
>-Mike
>
>
> >>> [email protected] 04/14/03 09:57AM >>>
>Is it cured or not? If cured not much can be done, and if it is not you
>can not
>etch it, only strip it. Do you mean you want to pattern PI with some
>other
>masking material and then wet etch it?
>
>
>--- Shadyar Farhangfar  wrote:
> > Dear All,
> >
> > Does anybody happen to know about the wet-etching of
> > polyimide? Is there any "standard" etchant to wet-etch
> > polyimide layers?
> >
> > Appreciating any hint,
> > Sh.Farhangfar
> >
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