I think you can deposit thin Ti or Cr layer on electroplated Cu film for
protection from oxidation. Then remove it with etchant when you need to
use Cu layer.

Jaephil Do

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Christopher F.
Blanford
Sent: Tuesday, April 08, 2003 10:11 AM
To: General MEMS discussion
Subject: Re: [mems-talk] electroplating of copper

Vikas: Could you please give more details?

o How thick are the films?
o What is the substrate?
o What conditions (bath composition, current density, temperature,
etc.) were used for the deposition?
o What do the films look like right after plating (optical or electron
micrograph evidence)?
o Under what conditions are the films kept/used?
o What do they look like as they degrade and after they degrade?
o Do you need some protection that retains the conductivity of the
surface?

Chris

On Monday, April 7, 2003, at 11:09  am, vikas vadloori wrote:

> we are working on electroplating of copper thin films
> but the plated films are degrading with time
> please suggest how to protect plated films from
> degradation
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: +44 (0)1865 282603; Fax: +44 (0)1865 272690
PGP keyID: 8D830BC9  http://pgp.mit.edu/


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