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MEMSnet Home: MEMS-Talk: Cr/Si interface.
Cr/Si interface.
2003-04-15
Brent Garber
Cr/Si interface.
Brent Garber
2003-04-15
Wu,

If you sputter etch your Si before sputtering your Cr you will make the
best contact interface.
When and what are you sintering?  What temperature are you going to
use?  Cr makes a better
mechanical interface than electrical.  I have sintered both Ni and Au
into Si.  The Ni in a slow oxidation
furnace and Au right on a hot plate.  I have never done Cr.


Brent



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