A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: wet-etching of polyimide
wet-etching of polyimide
2003-04-12
Shadyar Farhangfar
2003-04-14
Fariborz Nadi
Stiction tests
2003-04-14
ramji dhakal
2003-04-14
Michael D Martin
2003-04-15
Robert Dean
wet-etching of silver
2003-04-21
Helen Li
2003-04-24
Kirt & Erika Zipf-Williams
2003-04-16
Andy Scholes
2003-04-16
Conor O'Mahony
2003-04-16
[email protected]
2003-04-17
Mac Daily
wet-etching of polyimide
[email protected]
2003-04-16
Hi,

I use a photosensitive Polyimide to pattern my structures.
PI2721 behaves like -ve photoresist.
During development it is important that no water is in
contact with the Polyimide.

After development and spin drying to remove any liquid in
contact with the Polyimide surface, the Polyimide is cured.

Hope this helps

Best wishes
Anupama


> >--- Shadyar Farhangfar  wrote:
> > > Dear All,
> > >
> > > Does anybody happen to know about the wet-etching of
> > > polyimide? Is there any "standard" etchant to wet-etch
> > > polyimide layers?
> > >
> > > Appreciating any hint,
> > > Sh.Farhangfar
> > >
> > > __________________________________________________
> > > Do you Yahoo!?
> > > Yahoo! Tax Center - File online, calculators, forms,
> > > and more http://tax.yahoo.com
> > >
> > > _______________________________________________
> > > [email protected] mailing list: to unsubscribe or
> change your >list
> > > options, visit
> >http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> > > Hosted by the MEMS Exchange, providers of MEMS
> > > processing services. Visit us at
> http://www.memsnet.org/ >
> >
> >__________________________________________________
> >Do you Yahoo!?
> >Yahoo! Tax Center - File online, calculators, forms, and
> more >http://tax.yahoo.com
> >
> >_______________________________________________
> >[email protected] mailing list: to unsubscribe or
> change your list >options, visit
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk >
> >Hosted by the MEMS Exchange, providers of MEMS processing
> services. >Visit us at http://www.memsnet.org/
> >
> >_______________________________________________
> >[email protected] mailing list: to unsubscribe or
> change your list >options, visit
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> >Hosted by the MEMS Exchange, providers of MEMS processing
> services. >Visit us at http://www.memsnet.org/
> _______________________________________________
> [email protected] mailing list: to unsubscribe or
> change your list options, visit
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing
> services. Visit us at http://www.memsnet.org/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
Addison Engineering