Hi MEMS World,

I was wondering if anyone knows of a high temperature
adhesive ( upto 400C).

I would like to protect the patterned backside of my wafer
with a protection (dummy) wafer. The attachement has to be
done using a high temperature adhesive that will withstand
upto 400C in a furnace. At the end of my processing sequence
I need to dissolve the adhesive and remove the protection
wafer.

If anyone knows of such an adhesive which will not attach
Polyimide,  I would really appreciate if they can share
their experiences with me.

Sincerely
Anupama

Anupama V. Govindarajan
Graduate Student - EE MEMS laboratory
Department of Electrical Engineering
University of Washington
Campus Box 352500, Seattle WA 98195
Phone: (206)-221-5340
email: [email protected]