Dear Yilei,

Transene Company does not offer resist products for MEMS applications,
but our silicon and silicon oxide etchants are commonly used for MEMS
fabrication.  Please view our website at www.transene.com for a complete
list of our etchants and related products.

Sincerely,

Christopher Christuk
Transene Company
Tel:  978 777 7860
Email:  [email protected]

-----Original Message-----
From: Yilei [mailto:[email protected]]
Sent: Thursday, April 17, 2003 12:03 AM
To: [email protected]
Subject: [mems-talk] resist with good thermal stability

Hi member,
Can anyone recommend certain resist with good thermal stability that can
be
used to deposit thin film using PECVD? And more, it can be easily
removed with
selection on silicon and silicon dioxide at the same time. Thanks a lot.

Regards,
Yilei