Hello all,
Does anybody know if aluminum can be deposited directly onto Boron doped silicon
without impacting the piezoresistivity of the p-type silicon?
If there is interaction, what type of passivation layer should be used to
prevent it?
Thanks,
Jason
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Jason Rose
MEMS Design Manager
Intelligent MEMS Design, Inc.
"Your Partner in MEMS Solutions"
Tel: (613) 254-8848
Fax: (613) 230-0394
Email: [email protected]
359 Terry Fox Drive
Suite 220
Ottawa, Ontario, K2L 2E7
Canada
www.imemsdesign.com
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