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  • thin film thermocouples on Si-wafer (Bernard Revaz)
  • Q: Tools, Simulator FAQ (Burkhard Volland)
  • 110 Si etching with 20%KOH (Knighton, Ed)
  • Etching <100> and <110> wafer in KOH and surface roughness (George Diercks)
  • Thin PDMS membranes (Heiko van der Linden)
  • 110 Si etching with 20%KOH (Connie Kathleen Smith)
  • 110 Si etching with 20%KOH (Knighton, Ed)
  • Making 0.15um thick SiO2 film by anodic oxidation. (Fan Frank)
  • Bonding of quarzt crystal and silicon ([email protected])
  • thin film thermocouples on Si-wafer (Jon Doe)
  • etch psg oxide with Al ([email protected])
  • Etching <100> and <110> wafer in KOH and surface roughness (Roger Shile)
  • 110 Si etching with 20%KOH (Andrew J. Nielson)
  • Lab equipment needed (Behraad Bahreyni)
  • thin film pzt bimorph info (EH Yang)
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