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  • CAD tool for Grey Scale Mask making (sou zou)
  • cantilevers ([email protected])
  • Plating metal into SU-8 (Amanda Plimmer)
  • cantilevers (Vic Kley)
  • single crystalline quartz micromachining (Gary Bernstein)
  • Changing PDMS surface from hydrophobic into hydrophilic (Xinyu Li)
  • Plating metal into SU-8 (Muralidhar K. Ghantasala)
  • single crystalline quartz micromachining (Jim Beall)
  • wafer level vacuum packaging (Krishna Kashyap)
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Harrick Plasma
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Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics
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