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  • Bonding microchannels using SU-8 (Mikkel Fougt Hansen)
  • Adhesion layers that can withstand a 3 hour HF release (Bill Moffat)
  • Deep UV resists (Bill Moffat)
  • adhesive tape, glue (BRIAND Danick)
  • (100) Si deep etching (BERAUER,FRANK (HP-Singapore,ex7))
  • Removal of SU-8 (Jeff Zahn)
  • Looking for Dry Etching Systems ([email protected])
  • Removal of SU-8 ([email protected])
  • RE: Low stress LPCVD Nitride (Roger Shile)
  • Grad programs in MEMS (dinakar ramadurai)
  • (100) Si deep etching (Roger Shile)
  • MEMS through MOSIS (David Hong)
  • Re: problem of sidewall inhibition polymer ([email protected])
  • Grad programs in MEMS (Henry Yang)
  • ANNOUNCE: New MEMS-Business list (Andrew Kuchling)
  • Grad programs in MEMS ([email protected])
  • Grad programs in MEMS (Muralidhar K. Ghantasala)
  • Grad programs in MEMS (Mighty Platypus)
  • Titanium Spluttering (Oliver Powell)
  • ANNOUNCE: New MEMS-Business list (Franck Alexis Chollet (Asst Prof))
  • Grad programs in MEMS (Robert Okojie)
  • RE: SAMCO ICP Etching System, Model RIE-200iP (BERAUER,FRANK (HP-Singapore,ex7))
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