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how to bond silicon nitride to glass. (Andrew Liang)
III-N/Saphire & III-N/ Silicon wafers (PEYRADE David)
How to use ICP plasma etch to etch SiO2 and Si3N4 wit hout CF4? (
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Bonding Si to Si (Kenneth Smith)
Photoresists for Hot Phos. Acid Nitride Etching (
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