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  • um elastomer structures by UV patterning (Franck)
  • Bonding PDMS to glass? (matt cook)
  • high frequency material losses of SiN, SiO2, Si (Oberhammer Joachim)
  • Looking for MIOC data for I-FOG GYROS (Maximiliano Fischer)
  • rotary mechanical feedthrus (David Nemeth)
  • um elastomer structures by UV patterning (Oray Orkun Cellek)
  • Vendor for 700um polysilicon on 4"wafer ([email protected])
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