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  • KOH Etching (Shay Kaplan)
  • Plasma etching (PR as mask) (Shay Kaplan)
  • wet-etching of polyimide (Andy Scholes)
  • RIE With TRION Etcher (Eric Johnson)
  • wet-etching of polyimide (Conor O'Mahony)
  • cleaving of ultra-thin Si wafers (Kenneth Smith)
  • looking for MEMS partners (Robert Dean)
  • KOH etching-> Low SiN stress (Dave Kharas)
  • KOH Etching (beaton@npphotonics (Bill Eaton))
  • Si post etch process problems ([email protected])
  • wet-etching of polyimide ([email protected])
  • LPCVD amorphous silicon on glass wafer (Mighty Platypus)
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Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation
Nano-Master, Inc.