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High Temperature Adhesive (
[email protected]
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Si post etch process problems (Kirt & Erika Zipf-Williams)
where to find resist list? (Yilei)
resist with good thermal stability (Yilei)
lift-off with pmma (Lorenzo Sirigu)
KOH etching-> Low SiN stress (Michael Pedersen)
cleaving of ultra-thin Si wafers (Michael Yakimov)
Etch Protective Coating (Patti Shaw)
High Temperature Adhesive (Mac Daily)
PMMA Liftoff (Dave Kharas)
resist with good thermal stability (Jessica Gomez)
Surplus pyrex, silicon, and SOI wafers available (Shawn Cunningham)
Cannot etch through parylene C (Carmen Fung)
resist with good thermal stability (transene)
looking for MEMS partners (transene)
cleaving of ultra-thin Si wafers (Mario Robles)
MEMs Fab Tools --- For Sale (James Phay)
wet-etching of polyimide (Mac Daily)
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