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  • Copper Electroplate (Linda LW CHOW)
  • accelerometer Readout IC (Koo Myung Kwon)
  • DRIE Bosch-Process for through wafer openings (Jörn Koblitz)
  • Cu flash oxidation protection ([email protected])
  • Electronic Visions - EV-420 mask aligner (Greg Dittami)
  • Copper Electroplate (Customer Service)
  • radiant heater or quartz tube infrared heater for vacuum (Honggang Jiang)
  • polishing of silicon (sandhya)
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Harrick Plasma
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Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics
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