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  • Etchant and mask for Quartz (Ho Yin Chan)
  • SU-8 Chemical Resistance (Srinivas Parimi)
  • wafer bonding (Cetin, Volkan)
  • wafer bonding (Reiner Witte)
  • Thermal Expansion Coefficient of Silicon [111] [virus checked] ([email protected])
  • HP dry etching of SiO2 and SiNx (황일한)
  • Alumina slurry (Booth, David)
  • Dry etch mask (Zhiyan Liu)
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