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Dry etch mask (William Lanford-Crick)
HP dry etching of SiO2 and SiNx (Kirt Williams)
Leakage test (Kirt Williams)
Alumina slurry (
[email protected]
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Ti etching (Zhiyan Liu)
Problem of doing lift-off with PMMA and Aluminum Oxide... (
[email protected]
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EBL on insulator (Lee, Duhyun)
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