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Need Classic papers on MEMS (Shyam Venugopal)
Preparation of PZT thin film by Sol-gel method (LEIGHTON, GLENN)
types of substrate bonding (Regan Nayve)
gold or copper think films (Chen-Han Lee)
gold or copper think films (Amrit Panda)
types of substrate bonding (Pradeep Dixit)
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