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  • gold, photoresist, UV light, bubbles (Brad Cantos)
  • RIE - keep Temp constant (Karin Buchholz)
  • gold, photoresist, UV light, bubbles (Marco Doms)
  • RIE - keep Temp constant (Tripp, Marie Kathleen)
  • RIE - keep Temp constant (Brent Garber)
  • teflon coating of pyrex: C4F8, HMDS,...? (Marco Doms)
  • RIE - keep Temp constant ([email protected])
  • RIE - keep Temp constant (Shile)
  • method for bulk poly removal (Doug Stewart)
  • teflon coating of pyrex: C4F8, HMDS,...? (Gus Tombros)
  • PTFE Deposition on Si (Eric J. Correa)
  • PEG coating (haixinzhu)
  • how to spincoat a 50nm thin uniform film of AZ9260? (tmm)
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