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  • looking for Mems , Nems devices with ultra low energy consumption (Ali Mansouri)
  • AHW (Francesca Cavallo)
  • polishing the DRIE scalloping (Rahul Agarwal)
  • cantilever detection techniques (D. Sukumaran)
  • Isotropic Plasma Etch for Removing Sacrificial Photoresist La... ([email protected])
  • the problem of etchnig Cr/Cu (Cheng Ming Lin)
  • cantilever detection techniques (Pierre Huet)
  • PECVD PolySi Deposition (Isaac Wing Tak Chan)
  • Silicone DRIE (Lidija Malic)
  • Re: Isotropic plasma etch (Eric Woods)
  • the problem of etchnig Cr/Cu (Kirt Williams)
  • PECVD PolySi Deposition (li cai)
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