MEMS-talk

A MEMS Clearinghouse^® and information portal
for the MEMS and Nanotechnology community

News	MEMSnet Home: MEMS-Talk .. Deposite Si3N4 film by reactive rf magnetron sputtering (Cui Feng) Cleaning Si3N4 / SiO2 Surface (li cai) Iridium deposition (David Henriks) Iridium deposition (chong hanwoo) how to protect the sidewall of a trench which is 50micron in depth (#ZHOU QIAOER#) Plasma etching with sloped sidewalls. (Bruce Altemus) Stripping Off metal (ahajjiah) Would you like to tell me about the wet etching method of Si3N4 mask (luqy) Plasma etching with sloped sidewalls. (Isaac Wing Tak Chan) Plasma etching with sloped sidewalls. (Shane Arthur McColman) Would you like to tell me about the wet etching methodof Si3N4 mask (Pierre Huet) CF4/O2 pre-mixture for PECVD cleaning (Yuzhu Li) Iridium deposition (Pierre Huet) glass metal bonding (mallikarjun kamavaram) Stripping Off metal (Neal Ricks) Plasma etching with sloped sidewalls. (Bruce Altemus) glass metal bonding (Shile) Plasma etching with sloped sidewalls. (Isaac Wing Tak Chan) Anisotropic etch of SiO2 ([email protected]) how to protect the sidewall of a trench which is50micron in dept (Aeraj Ul Haque) Reg: Si3N4 wet etch (Krishna Vummidi)
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