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  • PDMS thin films (Vinodh Murali)
  • PDMS thin films ([email protected])
  • anodic bonding (Kamat Mahesh Keshav)
  • PDMS thin films ([email protected])
  • BSOI wafers (Michael L)
  • Electrostatic actuation in ANSYS 8 (Vitalik Vitalik)
  • Electrostatic actuation in ANSYS 8 (Daniel Shaw)
  • design rules 0.5 microns ([email protected])
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