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Cracks on SU-8 during the development (Schoembs, Ulrike)
copper beam etching (Ramesh Narayanan)
Adhesion problem of SU-8 on metal surface (Michael L)
TaN thin film as Barrier for Copper diffusion (PATEL JITENDRA)
TaN thin film as Barrier for Copper diffusion (Kirt Williams)
TaN thin film as Barrier for Copper diffusion (vishwanath sai)
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