MEMS-talk

A MEMS Clearinghouse^® and information portal
for the MEMS and Nanotechnology community

News	MEMSnet Home: MEMS-Talk .. Selective dissolution of Copper over FeNiCr (laetitia philippe) AZ 5214E layer thickness in spin-coating process (vlaminck vincent) Charge effects in electrostatic actuators ([email protected]) Ti adhesion on polyimide (kris) Gold undercut (kris) Thick Positive Photoresist (100um) (Brubaker Chad) SPR 220 on AU (Brubaker Chad) Ti adhesion on polyimide (Robert Dean) AZ 5214E layer thickness in spin-coating process (maryla krolikowska) unexpected etching pattern (xiaoyu) AZ 5214E layer thickness in spin-coating process (Farid Fouchal) Ti adhesion on polyimide (Michael D Martin) unexpected etching pattern (Shile) Re: Charge effects in electrostatic actuators (Tom Rust) Divots in Wafer (Anton V. Chakhmatov) To achive vertical sidewall of PR after dry etching of oxide (xiaodong wang)
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