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  • G line positive resist - non TMAH developer (Brehm, Harald)
  • Need 2u thick PZT etching with minimum undercut (<1u) (Lou Chomas)
  • needed: durable etch mask for making gratings in quartz ([email protected])
  • Stresses of SiO2 and Si3N4 (Lou Chomas)
  • Selective Cu & Cr Etchant (MEMS R FUN)
  • Ni Electroplating Issues (MEMS R FUN)
  • Polyimide etch (kris)
  • How to avoid the breaking of the cantilevers during the backside etching process? (Duan)
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