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Question about the mask for RIE etching (Eric TANG Xiaosong)
image reversal photoresist AZ 5214 (Carel Heerkens)
Wet etchant for fluoropolymer (Arun Kumar)
BOE chemical composition (Rupesh Sawant)
RIE: Vertical sidewalls, anisotropic, and isotropic etching on SiON (silicon oxy-nitride), silica or Si3n4, (Haoling Liu)
Hot press for microfluidic structures (Brubaker Chad)
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