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  • Hydrogel in microvalve application (Chris Folk)
  • Laser scalpel (Shay Kaplan)
  • Thermal evaporation of Al (Marc van den Boogaart)
  • clean the chips after DRIE (D. Zhou)
  • silicon nitridation poser (VS Bhat)
  • clean the chips after DRIE (Florian Herrault)
  • clean the chips after DRIE (Julie Verstraeten)
  • clean the chips after DRIE (Matthew Walker)
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Process Variations in Microsystems Manufacturing
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