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  • un-steep wall for AZ 4620 (Zhang Xiao Qiang)
  • crucible liner for evaporating Ta ([email protected])
  • Ohmic contact on Si (Borski, Justin)
  • Ohmic Contact to p-type Si (Nannan Chen)
  • Ohmic Contact to p-type Si (Tao)
  • Dry etch selectivity between Al and PMMA (Xiaojing Zou)
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