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etch velocity and etchant? (
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Methods to make thick resist layer (P.E.M. Kuijpers)
Meaurement of noise characteristics of microbolometers (D. Zhou)
Re: Does H2O2 attack AZ5214E? Does HCL:HNO3 attack uncrosslinked SU-8 (Michael D Martin)
Meaurement of noise characteristics of microbolometers (Wilson, Thomas)
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