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  • conductivity of SiO2 layer grown on top of heavily (Seongmu Heo)
  • Etching silicon nitride (Kvel Bergtatt)
  • Keeping in touch with MEMS development (Yue Mun Pun, Jeffrey)
  • DRIE Ge (Christian Schröder)
  • conductivity of SiO2 layer grown on top of heavily doped silicon (Edward Sebesta)
  • conductivity of SiO2 layer grown on top of heavily doped silicon (Wenlin Jin)
  • Dry etching of polyimide with PR mask (Zotl Ernst)
  • Dry etching of polyimide with PR mask (Nodes Norbert)
  • conductivity of SiO2 layer grown on top of heavilydoped silicon (Edward Sebesta)
  • Wanted: costs and sources for TEM sample prep and imaging (Albert Henning)
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