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  • Query on materials used in the manufacture of mems (Kristin Bautista)
  • thick S1813 (Fei Wang)
  • DRIE Etch lag due to microloading (Fei Wang)
  • Query on materials used in the manufacture of mems (Kirt Williams)
  • DRIE Etch lag due to microloading (Prasanna Srinivasan)
  • mems based pressure sensor (Albert Henning)
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