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  • This is known as RIE Lag RE: XeF2 etching of Si (junjun wu)
  • This is known as RIE Lag RE: XeF2 etching of Si ([email protected])
  • Transene Nickel etchant and Silicon (Roger Shile)
  • This is known as RIE Lag RE: XeF2 etching of Si (Edward Sebesta)
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