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  • Cr etching after HF vapor or BOE treatment. (Taekyung Kim)
  • Copper stability in TMAH ([email protected])
  • Cr etching after HF vapor or BOE treatment. (Don Friedrich)
  • Dry etching of Si (Alexandre BOE)
  • definition of hard bake and hard bake recipes ([email protected])
  • This is known as RIE Lag RE: XeF2 etching of Si (junjun wu)
  • Hard baking. Adhesion. RE: definition of hard bake and hard bake recipes (Edward Sebesta)
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