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  • Regular hole array in SU-8 (Michael Riss)
  • high temperature photoresist (DongJuan Xi)
  • Surface roughness measurement of Si (Zak Clark)
  • Silicon Nitride wafers (Pavan Samudrala)
  • microfabrication of blade structures (Chilcott, Dan - NV)
  • Surface roughness measurement of Si (Albert Henning)
  • high temperature photoresist (Pavan Samudrala)
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